JPS6234479Y2 - - Google Patents

Info

Publication number
JPS6234479Y2
JPS6234479Y2 JP1981004026U JP402681U JPS6234479Y2 JP S6234479 Y2 JPS6234479 Y2 JP S6234479Y2 JP 1981004026 U JP1981004026 U JP 1981004026U JP 402681 U JP402681 U JP 402681U JP S6234479 Y2 JPS6234479 Y2 JP S6234479Y2
Authority
JP
Japan
Prior art keywords
thick film
conductor layer
insulating substrate
hybrid integrated
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981004026U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57117696U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981004026U priority Critical patent/JPS6234479Y2/ja
Publication of JPS57117696U publication Critical patent/JPS57117696U/ja
Application granted granted Critical
Publication of JPS6234479Y2 publication Critical patent/JPS6234479Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Structure Of Printed Boards (AREA)
  • Lead Frames For Integrated Circuits (AREA)
JP1981004026U 1981-01-14 1981-01-14 Expired JPS6234479Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981004026U JPS6234479Y2 (en]) 1981-01-14 1981-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981004026U JPS6234479Y2 (en]) 1981-01-14 1981-01-14

Publications (2)

Publication Number Publication Date
JPS57117696U JPS57117696U (en]) 1982-07-21
JPS6234479Y2 true JPS6234479Y2 (en]) 1987-09-02

Family

ID=29802465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981004026U Expired JPS6234479Y2 (en]) 1981-01-14 1981-01-14

Country Status (1)

Country Link
JP (1) JPS6234479Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5696605B2 (ja) * 2011-07-01 2015-04-08 東京エレクトロン株式会社 基板処理装置のデータ取得方法及び基板処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49113162A (en]) * 1973-03-06 1974-10-29
JPS5529274U (en]) * 1978-08-17 1980-02-26

Also Published As

Publication number Publication date
JPS57117696U (en]) 1982-07-21

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